- Tungsten(VI)
fluoride, also known as tungsten hexafluoride, is a colorless
gas.
- Tungsten
Hexafluoride is nonflammable, but highly corrosive and very toxic.
- Tungsten
Hexafluoride is the densest known gas at a pressure of 1 atm and room
temperature (25 °C).
- The molecule is
octahedral with the symmetry point group of Oh.
- Tungsten(V1)
fluoride is a colorless gas that condenses to a colorless liquid at
19.5” and freezes to a crystalline white solid at 2.5”.
- Tungsten(V1)
fluoride fumes in moist air and must be handled under anhydrous
conditions.
- The specific gravity
of the liquid is 3.441 at 15’. It may be handled in carefully outgassed
glass systems provided that greases, mercury, and organic materials, as
well as water, are absent from the system.
- Tungsten
Hexafluoride gas is most commonly used in the production of
semiconductor circuits and circuit boards, through the process of
chemical
vapor deposition.
- Tungsten
hexafluoride of a purity high enough for semiconductor CVD is produced
by the reaction of fluorine gas with tungsten metal.
- The metal is placed
in a heated reactor, slightly pressurized to 1.2 to 2.0 psi, with a
constant flow of WF6 infused with a small amount of fluorine
gas.
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General
- Introduction about
Tungsten Hexafluoride
- Synonyms of Tungsten
Hexafluoride
Company Profiles
& Suppliers
- Company from
California
- Company from
Ohio
- Company from
Pennyslvania
- Company from
SouthKorea
- Company from
Tokyo
- Company from
USA
- Suppliers of
Tungsten Hexafluoride
Consultant &
Plant
- Plant from South
Africa
- Plant from
Tokyo
- Plant from
USA
- Consultant from
London
Process &
Properties
- The Chemistry of Metal CVD
- Selective solvent extraction of Tungsten(VI)
with N-n-octylaniline in Xylene
- Inorganic Synthesis
- Tungsten Hexafluoride Properties
Msds
- Tungsten Hexafluoride Msds
- Tungsten Hexafluoride
- Msds for Tungsten Hexafluoride
- HexafluoroTungsten Msds
- Tungsten Hexafluoride Msds
- Safety data sheet for Tungsten
Hexafluoride
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Patent &
Technology
- Purification
of tungsten hexafluoride
- Method for making
UHP tungsten hexafluoride
- Method of refining
tungsten hexafluoride containing molybdenum hexafluoride as an impurity
-
Gas chromatographic analysis of trace gas impurities in
tungsten hexafluoride
Hazards
-
Hazards Fact Sheet
-
Preparing Hazards materials for
military air shipments
-
National Emission Standards for
Hazardous Air Pollutants
-
Principles for the safe handling and
distribution of highly toxic gases and mixtures
RawMaterial Suppliers
-
Chlorine Manufacturers
-
Chlorine Exporters
-
Chlorine Selling leads
-
TungstenOxide Suppliers
Report
-
Development of the Table of Initial
Isolation and Protective Action Distances for the Emergency
Responce Guidebook
Chemical safety manual
A Military Guide to Terrorism in the
Twenty-First Century
Tungsten
Hexafluoride Report
Order The CD-ROM
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